Beschreibung
InhaltsangabeApplications and developments of thin film technology.- Importance of the vacuum technology for thin film coatings.- Evaporation in the vacuum.- Basic principle of plasma physics.- Gaseous phase and surface processes.- Coating by cathode sputtering.- Plasma treatment methods.- Ion beam-supported procedures.- Chemical Vapor Deposition (CVD).- Physical basics of modern methods of surface and thin film analysis.- Measurements of thin layers during the coating.- Measurements of thin layers after terminated coating process.- Nanoparticle Films.- Optical properties of thin films.
